1. Althen Sensors
  2. Sensors
  3. Vibration sensors
  4. Low frequency (seismic) vibration sensors
  5. ASC EQ-x211 / EQ-x215 Low-frequency capacitive MEMS accelerometer

ASC EQ-x211 / EQ-x215 Low-frequency capacitive MEMS accelerometer

Ultra-low noise seismic vibration sensor for structural health monitoring and environmental motion analysis


Key features

  • Noise density below 1.2 μg/√Hz
  • MEMS capacitive accelerometer sensor
  • ±3 g and ±5 g measuring range
  • Triaxial, biaxial or uniaxial configuration
  • DC response, gas-damped
  • IP65/IP68 aluminum or stainless steel housing

Performance highlights

The ASC EQ-x211 and EQ-x215 are low-frequency capacitive MEMS accelerometers designed to detect the smallest vibrations in seismic and structural health monitoring applications. With a noise density of <1.2 μg/√Hz and a resolution under 1 μg, these sensors meet the requirements for motion class B seismic measurements. 

Usage conditions

The EQ-x211 features a lightweight aluminum housing, while the EQ-x215 offers a rugged stainless steel version. Both variants are IP65-rated, with optional IP68 when using integrated cables and PG glands. The sensors offer differential analog output (±2.7 V FSO) and operate from 5 to 40 VDC. Available in uniaxial, biaxial, and triaxial versions, they provide flexible configuration for any installation scenario.

Typical applications

  • Structural health monitoring (SHM)
  • Seismic vibration sensing
  • Tunnel and dam monitoring
  • Low-frequency noise & vibration measurement
  • Infrastructure risk assessment in power plants and bridges

Advantages of choosing this product

The EQ-series is purpose-built for environments where small, long-period vibrations must be monitored continuously. These accelerometers use capacitive MEMS technology to deliver high-accuracy measurements across a DC to 700 Hz frequency range. With a built-in self-test function, temperature output, and multiple housing and cabling options, these sensors are ideal for critical monitoring tasks.

Other important features

  • Fully differential analog output (±2.7 V FSO)
  • High shock resistance and thermal stability
  • Temperature and self-test pin included
  • Detachable or fixed cable options
  • TEDS support and configurable connector types

Do you need this sensor for your next project?

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Technical Specifications

Specification Value
Measurement principle MEMS capacitive
Axes Uniaxial, Biaxial, Triaxial
Measuring range ±3 g, ±5 g
Output Differential ±2.7 V FSO
Supply voltage 5 to 40 VDC
Frequency range DC to 700 Hz (±3 dB)
Noise density <1.2 μg/√Hz
Housing options Aluminum (EQ-x211), Stainless steel (EQ-x215)
Ingress protection IP65 or optional IP68
Temperature output Yes (via pin)
Self-test function Yes (via external pin)
Cable Detachable or fixed, customizable
Optional features TEDS, connector type, PG gland

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  • MEMS Capacitive
  • Measurement Range: ±2 to ±400 g
  • Noise Density: 7 to 400 µg/√Hz
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ASC 4311LN / ASC 4315LN Capacitive accelerometer

  • Ultra-low noise MEMS sensor
  • ±400 g shock resistance
  • IP65 aluminum or stainless housing
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ASC OS-215LN-PG Capacitive Accelerometer

  • Biaxial
  • MEMS Capacitive
  • Measurement Range: ±2 to ±400 g
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