ILA PROBES Capacitive Position Sensor
"The cable is low-noise highly flexible silicone integral to the ILA probe and exits the probe axially"
Sample Applications for ILA probes
- Microscope focus
- Lens alignment
- Part profiling
- Part tilt
- Semiconductor wafer thickness
- Piezo stage displacement
- Vibration measurement
- Computer disk run out and thickness
- Brake rotor warp and thickness
- Sheet metal thickness
- Photovoltaic wafers
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Talk to an expertTechnical Specifications
| Specification | Value |
|---|---|
| Accuracy | 0.05% FS |
| Cable length | 2.44 m to 15.2 m |
| Measurement range | 0.025 to 2.54mm |
| Pressure rating | Standard 200 psig |
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ILR PROBES Capacitive Position Sensor
- Measuring range: 0,025 mm to 5,08 mm
- 0.05% FS Accuracy
- 200 psig Pressure rating
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- Measuring range: 0 to 1,78mm
- ±0.02% FS Accuracy
- Can measure highly resistive targets
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- Measuring range: 0 to 12,5 mm
- Up to six measurement channels
- Built-in low-noise AC power supply