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MEMS inclinometers for precise tilt measurement
MEMS inclinometers are high-precision sensors for measuring tilt angles and changes in position. They are based on MEMS technology (Micro-Electro-Mechanical Systems) and enable reliable detection of tilt and orientation relative to gravity. Thanks to their compact design, high measurement accuracy and fast response time, MEMS tilt sensors are ideal for a wide range of industrial applications.
At Althen, you will find a wide selection of MEMS inclinometers for precise tilt measurements in machines, vehicles and industrial systems. We offer analogue and digital inclinometers (tilt sensors) with capacitive MEMS technology. Each sensor can measure positive and negative tilt angles from +/-1° to +/-90° in single-axis and dual-axis configurations. By selecting the angle range, bandwidth, analogue or digital electrical output and other parameters, you receive exactly the sensor you need for your application.
How do MEMS inclinometers work?
MEMS inclinometers measure the tilt of an object relative to the Earth’s gravity using micromechanical structures inside the sensor. These structures respond to changes in acceleration, enabling precise determination of the tilt angle. This measurement principle gives MEMS inclinometers many advantages. They enable a compact design, fast signal processing and stable measurement performance, even in dynamic applications.
Advantages of MEMS inclinometers
MEMS inclinometers are often used when reliable and high-resolution tilt measurements are required.
Key advantages include a compact and robust design, enabling easy integration into existing systems. At the same time, MEMS sensors offer high resolution and measurement accuracy, allowing even the smallest angle changes to be detected reliably. In addition, they stand out through low power consumption and fast response times, making them particularly attractive for mobile and automated applications.
Typical applications for MEMS inclinometers
Thanks to their versatility, MEMS inclinometers are used in many industries where precise tilt or position information is required.
Typical areas of application include:
- Machine and plant monitoring
- Construction machinery and mobile working machines
- Automation and robotics systems
- Structural monitoring of buildings and infrastructure
- Platform and levelling systems
- Agricultural machinery and vehicles
MEMS inclinometers for industrial applications
MEMS inclinometers are designed for use in demanding industrial environments. They offer high resistance to vibration, temperature fluctuations and mechanical stress. This makes them ideal for applications where stable and reliable measurement data is required.
With different measuring ranges, interfaces and output signals, MEMS inclinometers can be flexibly integrated into various control and monitoring systems.
MEMS inclinometers at Althen
Althen offers a wide selection of high-precision MEMS inclinometers for industrial, mobile and OEM applications. Our experts support you in selecting the right sensor, from standard solutions to customised measurement systems.
Contact us to learn more about our MEMS inclinometers and find the ideal solution for your application.
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High measurement accuracy in a compact designMEMS inclinometers provide precise tilt measurement in an extremely compact sensor format. This makes them easy to integrate into machines, mobile systems and industrial installations.
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Reliable measurements, even in dynamic applicationsThanks to modern MEMS technology, the sensors deliver stable and fast measurement values, even under vibration or in moving systems.
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Robust for industrial operating conditionsThe sensors are designed for demanding environments and withstand temperature fluctuations, mechanical stress and harsh industrial conditions.
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Flexible integration into control and monitoring systemsWith different measuring ranges, interfaces and output signals, MEMS inclinometers can be easily integrated into existing automation and monitoring systems.
Important selection criteria for MEMS inclinometers
When selecting a MEMS inclinometer for your application, several technical factors should be considered to ensure reliable tilt measurement and optimal integration into your system. Choosing the right sensor is essential for precise measurement data, stable signals and long-term operational reliability.
- Measuring range
First, the required tilt or angle measuring range of the application should be defined. MEMS inclinometers are available in various measuring ranges, such as ±30°, ±60° or ±90°. The selected sensor should be able to reliably capture the full tilt range in order to provide accurate measurement values across the complete range of motion. - Measurement accuracy and resolution
For many applications, tilt measurement accuracy is a decisive factor. Resolution, linearity and overall sensor accuracy should therefore be checked carefully. High resolution makes it possible to detect even the smallest tilt changes precisely. - Single-axis or dual-axis measurement
Depending on the application, a single-axis or dual-axis tilt sensor may be required. Single-axis inclinometers measure tilt along one axis, while dual-axis sensors can detect tilt changes in two directions simultaneously. - Output signal and interfaces
The sensor’s output signal also plays an important role in system integration. MEMS inclinometers are available with different signal types, such as analogue voltage or current signals, as well as digital interfaces such as CAN, RS485 or Modbus. The selected signal should be fully compatible with your control or data acquisition system. - Environmental conditions
The operating environment has a major influence on sensor selection. Factors such as temperature ranges, vibration, shock loads, humidity or dust can affect measurement performance. For industrial applications, inclinometers should be selected that are specifically designed for harsh environments. - Response time and dynamics
In applications with moving machines or vehicles, the sensor’s response time is also crucial. A MEMS inclinometer with fast signal processing enables precise detection of tilt changes in dynamic systems. - Mounting and installation
Mechanical integration should also be taken into account. The size, design and mounting options of the sensor must match the available installation space and enable stable installation to avoid measurement errors.
By carefully evaluating these factors, you can select the right MEMS inclinometer for your application. This ensures precise tilt measurements, reliable measurement signals and a long-term stable sensor solution for industrial and mobile applications. Contact our experts to learn more about Althen’s MEMS inclinometers and find the ideal solution for your application.
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Frequently asked questions about MEMS inclinometers
Answers to the most important technical questions
What influence do movement and acceleration have on measurements with MEMS inclinometers?
MEMS inclinometers measure inclination relative to Earth’s gravity. In stationary or slowly moving applications, they provide very stable and precise measurement values. However, additional accelerations, for example caused by fast movements, vibrations, shocks, or changes in direction, can influence the measurement signal.
The reason is that the sensor does not only detect Earth’s gravity, but also dynamic accelerations that occur during movement. As a result, the measured inclination may temporarily deviate from the actual angle.
For many industrial applications with slow or controlled movements, MEMS inclinometers are well suited. For highly dynamic applications, Althen recommends an application-specific sensor selection or, where necessary, a combined sensor solution to reliably capture inclination, movement, and acceleration.
How does communication via Modbus work in MEMS inclinometers?
In MEMS inclinometers with a Modbus interface, the measured inclination values are transmitted digitally to a controller, data acquisition system, or monitoring platform. The sensor measures inclination relative to Earth’s gravity and provides the measurement values via a digital interface such as RS485 with Modbus. Althen offers MEMS inclinometers with various output signals, including analogue signals as well as digital interfaces such as CAN, RS485, or Modbus.
In practice, Modbus usually works according to the master-slave or client-server principle: a higher-level controller cyclically queries the inclinometer, and the sensor responds with the current measurement values, such as the inclination of the X and/or Y axis, status information, or other device-specific data. Modbus RTU is often used via serial interfaces and is therefore well suited for industrial systems with multiple field devices. In this setup, up to 20 transducers could be used in a shared bus system with time-coordinated addressing.
The advantage lies in easy integration: MEMS inclinometers with Modbus can be directly integrated into automation, control, and monitoring systems. Depending on the sensor model and application, parameters such as measuring range, address, baud rate, or data polling can be adapted to the existing system. The exact register assignment and communication parameters are model-dependent and are specified in the respective datasheet or technical documentation.
What is the response time of MEMS inclinometers?
The response time of MEMS inclinometers depends on the specific sensor model, the selected filtering, bandwidth, and output signal. In general, MEMS inclinometers are designed for fast signal processing and are also suitable for dynamic applications involving moving machines or vehicles.
For digital versions such as the JDI-100/200, the dynamics are configurable: depending on the setting, the data rate can be selected from 3.9 to 125 Hz, and the bandwidth is typically one quarter of the sampling rate. In addition, filtering can be adjusted by the user. For the JDHI, rates from 2,400 to 500,000 bps are selectable.
For selecting the right model, the required response speed should always be considered together with the measuring range, accuracy, vibration, and installation situation. Althen supports you in selecting a MEMS inclinometer with the appropriate response time for your application.
Are MEMS inclinometers with temperature compensation available?
Yes, Althen offers MEMS inclinometers with temperature compensation. Depending on the model, the temperature influence is digitally compensated to ensure that inclination measurements remain stable and precise, even under changing environmental conditions.
Examples include the JDI-100/200 MEMS inclinometer, which is digitally temperature-compensated, as well as the JDHI MEMS inclinometer. Both series are designed for industrial applications and operate across a wide temperature range from -40 °C to +85 °C.
Temperature compensation helps reduce measurement deviations caused by temperature drift. This is particularly important for outdoor applications, mobile machinery, automation, platform levelling, and long-term monitoring tasks. The most suitable version depends on the measuring range, number of axes, output signal, and environmental conditions.